https://www.selleckchem.com/products/b02.html
This article documents the design, manufacture, and testing of a silicon inertial optical sensor for low-frequency (lower than 2 kHz) applications. Three accelerometer designs optimized by parameterization using Finite Element Analysis were considered. The accelerometers were manufactured and the one with the highest performance at low frequency was chosen for testing, which was attached to a steel package. The feasibility of using probes, based on micro-machined sensing elements, to measure mechanical vibrations with high resolution was al
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